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1.
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Select DOE > Design Diagnostics > Sample Size and Power.
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2.
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Click Counts per Unit.
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1.
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Leave Alpha as 0.05 (the chance of failing the test if the new process is as good as the target).
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2.
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Enter 4 as the Baseline Counts per Unit, indicating the target of 4 defects per wafer.
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3.
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Enter 1 as the Difference to detect.
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This is the chance of detecting a change larger than 1, which is equivalent to 5 or more defects per wafer. In this type of situation, the significance level (alpha) is sometimes called the producer’s risk and the power (beta) is called the consumer’s risk.
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5.
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Click Continue.
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Figure 16.14 Counts per Unit Calculator
